Defect review
Advanced: Theory and Maintenance
Curriculum
Who should attend?
This course is required for anyone who will be working with VeritySem II 200mm/300mm Tool family CD-SEM system including hardware engineers, and applications engineers.
Course Objective and Summary
Course Objective and Summery
* Locate and describe all safety hazards associated with the basic operations of theCD-SEM tools
* Locate and describe the main components and Capabilities of the CD-SEM tools 150mm/200mm/300 * Perform a CD Measurement Job
* Program a recipe for 5 site automatic CD
* Optimize a recipe
* Apply Best Known Methods (BKM’s)
* Review the Results
Information
Course Benefits
Increase knowledge of system components and their interrelationships – Improve Automatic CD Recipes
Course Information
Prerequisites: None
Course location: Classroom and Cleanroom in the GTi Applications Lab
Course Length: 5 working days
Maximum Number of attendees: 4