Menu
0
Home
Equipment
Service
Parts
eBay Store
About
Contact Us
Your Cart is Empty
0
0
Home
Equipment
Service
Parts
eBay Store
About
Contact Us
Applied Materials (AMAT) VeritySEM Automated CD Metrology System
$9,999,999.00
Wafer Specification:
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 12” PP Miraial
SMIF Interface No
Electron Optical System:
Electron Gun Schottky Emission Source (fei)
Accelerating Voltage 300V to 2000V
Probe Current Low 5pA / Medium 10pA / High 20pA
Electromagnetic Lens 3 Stage Electromagnetic Lens
System with Boosting Voltage Beam Deflector Module
Objective Lens:
Scan Coil 2-Stage Electromagnetic Deflection (X- and Y-Axes)
Magnification 1,000x to 400,000x (100um to 0.25um FOV)
Wafer Imaging Ability Entire Surface of 12” Wafer
Aspect Ratio >20 : 1
Resolution 2nm (500V)
Optical Microscope System:
Camera Monochrome, using CCD camera
Magnification 16x / 220x (450um / 6000um FOV)
Wafer imaging ability Entire surface of 12” wafer
Workstation:
Model SGI Fuel
SECS/GEM Communication Interface:
Automated Image Archiving Function Always / Online Setup / Never
Measurement Function Average/Maximum/Minimum/Contact Hole/Line Edge Analysis/CH Analysis/Slope
Measurement Algorithm Normal / Foot / Threshold
Wafer Stage:
Wafer Stage Anorad XY and Z Stage
Moving Speed 300mm/sec
Function Target Faraday Cup / Resolution Target
Wafer Transfer:
Wafer Shape Ability Notch / Orientation Flat
Pre-alignment Sensing by CCD BAR (200/300mm wafer)
Accessory:
External Power Distribution Unit
Fun Filter Unit
Add to Cart
Call us at
(800) 608-4834
for Price and Availability