[We ]

*Our Response to COVID-19

GTI is aligned with recommendations of the World Health Organization and our products, services and support are essential to the continued operation of critical infrastructure connecting people and businesses.

Based on current assumptions related to COVID-19 impact, our current delivery dates and response times remain unchanged.

We are working persistently to continue to support our customers and minimize disruptions during this unprecedented time.


VeraSem 3D 150 / 200 / 300mm

NANOSem 3D 150 / 200 / 300mm

Verity I 150 / 200 / 300mm

Verity II 150 / 200 / 300mm

Verity III 150 / 200 / 300mm

Verity IV I + 150 / 200 / 300mm



SEMVision DR-300 150 / 200 / 300mm

SEMVision G2   150 / 200 / 300mm

SEMVision G2+ 150 / 200 / 300mm

SEMVision G3   150 / 200 / 300mm

SEMVision G5   150 / 200 / 300mm


WF-736DUO  150 / 200mm

Compass 200 150 / 200mm

Compuls 2T   200 / 300mm

Compuls 3T  200 / 300mm

Complus 4T  200 / 300m


State-of-the-Art Metrology Tool Experts

what we do

Spare Parts and Support Equipment

Comprehensive inventory of over 60,000 spare parts in stock.
- End of life issues resolution
- Upgrades
- Optimization

Complete System Sales, Turn-key Solutions

We specialize in the refurbishment and renewal of equipment manufactured by Applied Materials®, KLA-Tencor, and August Technologies (ONTO™).

Training Packages

Hardware and Application training courses on-site or at GTI's applications lab.

Expert Service, Support, Hardware, and Application

Elite Field Service Experts stationed in North America, Europe, and Asia. Programs include on-call and on-site solutions, tool installation, and tool relocation services.

Demo Lab and Foundry Service

State-of-the-art, fully calibrated metrology equipment currently running customer products for evaluation or development.
- Special wafer thicknesses
- Exotic materials
- 150mm, 200mm, 300mm wafers

System Sales | Service Support | Calibration | Demo Lab | Upgrades | Spares

Defect Review SEM

Applied Materials®, Inc. has introduced the SEMVision DR-SEM system, a fully-automated defect review and classification scanning electron microscope specifically designed for in-line operation on advanced semiconductor production lines. The system uses several SEM imaging and material analysis techniques to improve chipmakers’ yield earning cycles during fab ramp-up and enable tighter yield control in volume production.

The system features Multiple-Perspective SEM Imaging (MPSI) technology that provides chipmakers with more information for accurately classifying and analyzing defect types than current SEM or optical imaging techniques. By enhancing both the topographic and material characteristics of defects, MPSI technology has enabled the development of an automatic defect classification (ADC) concept that classifies defects into types that are closely linked to the defects' source.




Beginning first half of 2020, GTI developed the capability of processing transparent wafers on DR-SEM and CD-SEM tools.

Silicon Carbide H4 and H6, GaAs, Sapphire wafers, ZnO, Gallium Nitride wafers, Lithium Niobate wafers, SOI, and Quartz.

System Sales | Service Support | Calibration | Demo Lab | Upgrades | Spares

Critical Dimension Metrology Systems

Critical dimension (CD) metrology is one of the most essential technologies in semiconductor manufacturing. Much media attention is devoted to the ever shrinking feature sizes of microelectronic devices, as this parameter heavily influences speed of operation and power demands. Less appreciated is the fact that while the dimensions are on the nanometer scale, the manufacturing tolerances must be far smaller. This places great demands on the quality assurance assessment techniques.

Contact Directly


15936 N 78th St
Scottsdale, AZ 85260

Toll Free: (800) 608-4834
Local: (480) 400-6910




GTI Technology Limited

Unit E. 11/F Tower B Billion Center No. 1 Wang Kwong Road Kowloon Bay

Hong Kong



Europe North

Am Moosbach 6
74535 Mainhardt  

Phone: +49 790 391 4412

Mobile: +49 173 279 1153

Fax: +49 790 391 4411

Europe South

| Spain | France | Italy | Belgium | Switzerland   Malta | Morocco

Teltec SAS
939, rue de la croix verte
34090 Montpellier 

Phone: +33 467 22 40 00

Fax: +33 467 22 26 37