KLA-Tencor Starlight SL3UV-HR URSA

Vintage: 1999
Reticle Size: 150mm
S/N: 505
Can support review down to 150nm

Automation:
  • KLARF File Format Output
  • KLArity Analysis Ability
  • Automatic Error Recovery
System Output:
  • Minimum Output Capability (reticles per week) for 0.25 um pixel size with 100mm x 100mm inspection area: 100
  • Minimum Run Rate (reticles/hour) for 0.25 um pixel size for 100mm x 100mm inspection area: 0.7
  • Minimum Run Rate (reticles/hour) for 0.375um pixel size for 100mm x 100mm inspection area: 1.3
  • Minimum Run Rate (reticles/hour) for 0.5 um pixel size for 100mm x 100mm inspection area: 1.9
PROCESS CAPABILITY
  • Box Handling Capability:
  • Nikon 6” reticle compatibility
  • Manual Load Capability
Mask Basic Inspection Capability:
  • OPC inspection capability
  • APSM (DAP design) inspection capability
  • EPSM inspection capability including EPSM and Full Ternary, where shifter transmission is ≤ 40% at 364nm wavelength
Review Capability:
  • Transmission Review Capability
  • Reflective Review Capability
  • On line Review Capability
  • Repeat Review Capability
  • Sizing capability
  • Offline view capability (not classification)
  • Offline classification (Option)
  • Show new defect capability
Recipe Setup/Automation:
  • Auto setup capability
  • Light tower
  • Selectively inspect: Glass, Pellicle, and/or Chrome Surfaces
  • Maximum Recipe Setup Time (minutes): 15
  • Three level password protection capability (operator, Engineer and FSE)
  • Continuous vs. single-step operation capability
  • Auto loader cycling capability
  • Barcode reading capability
  • Networking capability
  • Auto operation capability with existing recipe
Minimum Inspectable Mask Characteristics:

Minimum Pitch larger than/or equals to twice of the minimum linewidth:
  • Minimum inspectable main feature size (nm) at 0.186 um pixel size (option): 400
  • Minimum inspectable main feature size (nm) at 0.25 um pixel size: 500
  • Minimum inspectable main feature size (nm) at 0.375 um pixel size: 750
  • Minimum inspectable main feature size (nm) at 0.5 um pixel size: 1000
Minimum Pitch larger than /or equals to 2.5 times of the minimum chrome linewidth:
  • Minimum inspectable main feature size (nm) at 0.186 um pixel size (option): 220
  • Minimum inspectable main feature size (nm) at 0.25 um pixel size: 320
  • Minimum inspectable main feature size (nm) at 0.375 um pixel size: 560
OPC Features:
  • Minimum inspectable OPC serif/inverse (nm): 200
  • Minimum inspectable OPC jog (nm): 14
Inspection Characteristics:
  • Within tool Matching: ≤5%
  • Tool to tool Matching: ≤10%
  • False Defect Rate (defects/cm2): 0.1
  • For Inspection Area > 10 cm2: 0.1
  • Sensitivity on Pellicle @98% capture rate (nm): 4000
  • Sensitivity on glass @98% capture rate (nm): 4000
Minimum Pitch larger than/or equals to twice of the minimum linewidth:
  • Sensitivity on Chrome @98% capture rate (nm) at 0.186um inspection pixel size on a reticle using PSLs (option). EPSM capture rate on shifter substrate @90.4%: 140
  • Sensitivity on Chrome @98% capture rate (nm) at 0.25um inspection pixel size on a reticle using PSLs. EPSM capture rate on shifter substrate @90.4%: 180
  • Sensitivity on Chrome @98% capture rate (nm) at 0.375um inspection pixel size on a reticle using PSLs: 250
  • Sensitivity on Chrome @98% capture rate (nm) at 0.50um inspection pixel size (if installed) on a reticle using PSLs. (same spec for 0.375um pixel size inspection in fast scan mode): 350
Minimum Pitch larger than /or equals to 2.5 times of the minimum Chrome linewidth:
  • Sensitivity on Chrome @98% capture rate (nm) at 0.186um inspection pixel size on a reticle using PSLs. (option) EPSM capture rate on shifter substrate @90.4%: 180
  • Sensitivity on Chrome @98% capture rate (nm) at 0.25um inspection pixel size on a reticle using PSLs. EPSM capture rate on shifter substrate @90.4%: 250
  • Sensitivity on Chrome @98% capture rate (nm) at 0.375 um inspection pixel size on a reticle using PSLs: 350
  • Sensitivity on Chrome @98% capture rate (nm) at 0.5 um inspection pixel size on a reticle using PSLs: 500
Exclusion Zones
Pelliclized plate:
  • Exclusion on Chrome side (mm)
  • For 0.25um pixel or greater: 3.5
  • For 0.186um pixel: 5.5
  • Exclusion on Pellicle (mm): 1
  • Exclusion on Glass (mm): 3
Unpelliclized plate:
  • Exclusion on 6” back glass: 3
  • Exclusion on 6” Front side: 3X