TEL Clean Track ACT 8

Tokyo Electronic Clean Track ACT 8 SOG Track

Wafer Size:  200mm

Serial Number:  S008

Vintage:  2000

Available As Is or Fully Refurbished with Warranty

Specification:

Inline left or right configuration available

Overview:

  • 3 Blocks Interfaced:  Cassette-Process-Side Cabinet Interface
  • 2 Transfer Robot Arms:  Cassette & Process

2 SOG Coaters

  • 2 SOG nozzles with temperature control
  • TARC compatible; Teflon coated chamber

4 Chill Plate Process Stations with temperature control

1 Transfer Chill Plate

4 Low Temperature Hot Plate Process Stations with temperature control

4 High Temperature Hot Plate Process Stations with temperature control

Subcomponents:

  • Fluid Temperature Controller
  • Temperature and Humidity Controller
  • Side Chemical Cabinet
  • AC Power Box

SECS/GEM compatible