Applied Materials (AMAT) SEMVision G2 Plus Defect Review and Analysis System
$9,999,999.00
General Info:
- Model: AMAT SEMVision G2+
- Description: Defect Review System
- Wafer Size: 300mm
- Serial Number: W-111
- Vintage: 2001
- Warranty: As Is or Refurbished to Customer Spec
- Loader: AMAT ADO with RFID
- Wafer Size: 300mm
- ETU 300mm
- ITU 300mm
- FFU with ULPA Filter
- SEM Column G2
- EDX Column
- 45 Deg Column Tilt
- Wafer Rotation option included
- Stage wafer holder 3 PIN
- Aligner Optical Microscope X5, X20, X100
- Software version (WS, IP/ODC SW, MEC, WHC): v5.1.500 WorkStation SGI FULE
- Software version (EDX): VTG_5.0.107
- Pal (On the OTW, cassette / Slot 1: Delta X= 500 μm; Delta Y= 500 μm
- ITU Repeatability: Delta X and Delta Y < 20 μm
- Stage accuracy: Delta X and Delta Y < 1.5 μm
- MTR: Delta X= 50; Delta Y= 30 μm
- Resolution at 1 KeV: 3 nm
- Focus map / focus offset: 90% of the defect with Delta Z < 3 μms
- Automatic defect offset/XY Map: 95% of the defects with Delta X < 1.5 μm and Delta Y < 1.5 μm
- EDX resolution 4nm
- Wafer throughput: 12 Wafers / Hours
- Defects throughput: >1000 Defects / Hour
- Cleanliness front side: 0.013 PWP / cm2 > size at 0.2 μm
- Largest load ampere rating: 8 A
- Full load current: 10 A
- Interrupt current: 10,000 Amps I. C.
- Supply voltage: 1-120 VAC, 1-Ph, 3-wires 208 V, 3-Ph, 5-wires, 50/60 Hz