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Applied Materials (AMAT) SEMVision G2 Plus Defect Review and Analysis System
$9,999,999.00
General Info:
Model: AMAT SEMVision G2+
Description: Defect Review System
Wafer Size: 300mm
Serial Number: W-111
Vintage: 2001
Warranty: As Is or Refurbished to Customer Spec
Wafer Handling:
Loader: AMAT ADO with RFID
Wafer Size: 300mm
ETU 300mm
ITU 300mm
Configuration:
FFU with ULPA Filter
SEM Column G2
EDX Column
45 Deg Column Tilt
Wafer Rotation option included
Stage wafer holder 3 PIN
Aligner Optical Microscope X5, X20, X100
Software:
Software version (WS, IP/ODC SW, MEC, WHC): v5.1.500 WorkStation SGI FULE
Software version (EDX): VTG_5.0.107
System Performance:
Pal (On the OTW, cassette / Slot 1: Delta X= 500 μm; Delta Y= 500 μm
ITU Repeatability: Delta X and Delta Y < 20 μm
Stage accuracy: Delta X and Delta Y < 1.5 μm
MTR: Delta X= 50; Delta Y= 30 μm
Specifications:
Resolution at 1 KeV: 3 nm
Focus map / focus offset: 90% of the defect with Delta Z < 3 μms
Automatic defect offset/XY Map: 95% of the defects with Delta X < 1.5 μm and Delta Y < 1.5 μm
EDX resolution 4nm
Wafer throughput: 12 Wafers / Hours
Defects throughput: >1000 Defects / Hour
Cleanliness front side: 0.013 PWP / cm2 > size at 0.2 μm
Facility:
Largest load ampere rating: 8 A
Full load current: 10 A
Interrupt current: 10,000 Amps I. C.
Supply voltage: 1-120 VAC, 1-Ph, 3-wires 208 V, 3-Ph, 5-wires, 50/60 Hz
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(800) 608-4834
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