SEMICONDUCTOR SERVICE & SUPPORT
Expert Support for
NextGEN Systems
GTI provides expert field service and technical support for NextGEN CD-SEM and DR-SEM systems—from preventive maintenance and troubleshooting to calibration, recipe optimization, and tool-to-tool matching.
Our service programs are designed to keep systems performing to specification and give customers access to GTI expertise when and where it is needed.
Why GTI Service & Support
GTI support goes beyond equipment repair. Backed by decades of semiconductor equipment experience, GTI Customer Engineers provide the technical expertise to maintain performance, resolve system issues, and optimize NextGEN systems throughout their operational lifecycle.
Support May Include:
- Preventive and corrective maintenance
- On-site and remote technical support
- Calibration and tool-to-tool matching
- Recipe development and optimization
- Metrology and process support
- Spare parts support
- Training and technical assistance
Advanced Semiconductor
Service Capabilities
CORRECTIVE MAINTENANCE
When a NextGEN system requires repair or recovery, GTI Customer Engineers provide remote or onsite troubleshooting to identify the issue, perform the necessary corrective service, and return the system to operation.
Corrective Maintenance Support May Include:
- System troubleshooting and fault isolation
- Hardware and component repair
- FRU replacement
- System recovery and performance verification
- Spare parts coordination
- Technical escalation when required
PREVENTIVE MAINTENANCE
GTI preventive maintenance programs provide scheduled service designed to maintain system performance and address routine maintenance requirements before they develop into larger equipment issues.
Preventive Maintenance May Include:
- System inspection and performance checks
- Calibration
- Filament replacement
- Vacuum pump checks
- Cleanroom environment verification
- System-specific maintenance requirements
SEM Support
GTI provides specialized support for NextGEN CD-SEM and DR-SEM systems, with a focus on measurement performance, consistency, defect classification, and recipe optimization.
CD-SEM Support
GTI engineers can also assist with new process nodes and challenging metrology requirements.
CD-SEM Support Capabilities:
Calibration
Tool-to-tool matching
Recipe development and optimization
Image quality support
Data backup
Metrology and process support
DR-SEM Support
GTI engineers can also assist with defect review requirements and challenging inspection needs.
DR-SEM Support Capabilities:
ADR/ADC optimization
Review speed optimization
Defect library support
Recipe management and optimization
Image quality support
Technical engineering support
Bank of Hours
GTI SUPPORT WHEN YOU NEED IT
GTI Field Service and Customer Engineers provide service and technical support across North America, Europe, and Asia, with onsite and remote support options available.
For customers who do not require a full-service agreement, GTI’s Bank of Hours provides flexible access to GTI Customer Engineers and technical expertise through pre-purchased support hours.
Hours can be used for approved service and technical needs, including troubleshooting, maintenance, recipe support, tool matching, training, and technical assistance.
Flexible pre-purchased support plans are available in 300, 600, and 1,200-hour options.
GTI Semiconductor Service Menu
FLEXIBLE SUPPORT FOR NEXTGEN SYSTEMS
GTI offers multiple levels of semiconductor equipment service for NextGEN systems. From on-demand technical assistance to dedicated onsite support, service programs can be structured around your system requirements and level of coverage needed.
EQUIPMENT TRAINING & TECHNICAL ASSISTANCE
Training is available for tool operation, equipment tasks, troubleshooting, and technical process knowledge. GTI also offers application training for improving theoretical and operational knowledge.
Choose the level of GTI support that fits your operation.
Let’s Optimize Your Tool Performance
Contact GTI to build a customized service plan for your fab.
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CONTACT
EMAIL: sales@gt3i.com
PHONE: 480-400-6910
PHONE: 800-608-4834
LOCATION: 15936 N 78th St
Scottsdale, AZ 85260
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