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defect review

Basic Applications

Curriculum

Who should attend?

This course is designed for those individuals in the semiconductor industry who require the knowledge and skills to perform routine maintenance on DR-SEM 200mm/300mm Applied Materials SemVision DR-200 DR-300 G2 G3 G4 G5 and GX

Course Objective and Summary

Identify Locate and describe all safety hazards associated with the basic operations of the SEM Vision 200mm/300mm

Describe Locate and describe the main components and capabilities of the SEM Vision 200mm/300mm.

Perform a review job

Program a recipe for an automatic review (D2D, 020) Optimize a recipe
Apply Best Known Methods (BKMs)
Review the results

Curriculum

Course Benefits

* Increase functional knowledge of DR-SEM 200/300mm system components and subcomponents

* Increase Improve automatic defect review success rates by optimized program- ming of patterned wafer recipes

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom on customer site or GTI Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4