defect review
Basic Applications
Curriculum
Who should attend?
This course is designed for those individuals in the semiconductor industry who require the knowledge and skills to perform routine maintenance on DR-SEM 200mm/300mm Applied Materials SemVision DR-200 DR-300 G2 G3 G4 G5 and GX
Course Objective and Summary
Identify Locate and describe all safety hazards associated with the basic operations of the SEM Vision 200mm/300mm
Describe Locate and describe the main components and capabilities of the SEM Vision 200mm/300mm.
Perform a review job
Program a recipe for an automatic review (D2D, 020) Optimize a recipe
Apply Best Known Methods (BKMs)
Review the results
Curriculum
Course Benefits
* Increase functional knowledge of DR-SEM 200/300mm system components and subcomponents
* Increase Improve automatic defect review success rates by optimized program- ming of patterned wafer recipes
Course Information
Prerequisites: None
Course location: Classroom and Cleanroom in the GTi Application Lab
Course Length: 5 working days
Maximum Number of attendees: 4