Critical Dimension

Advanced: Theory and Maintenence

Curriculum

Who should attend?

This course is designed for those individuals in the semiconductor industry who require the knowledge Applied Materials VeritySEM II

Course Objective and Summary

* Identify all safety hazards associated with the CD-SEM tools 150mm / 200mm / 300mm
* Describe the functional description and theory of operation of the CD-SEM tools 150mm / 200mm/300mm.
* Operate the VeritySEM II control system including basic UNIX functions
* Perform scheduled routine maintenance Procedure for the CD-SEM, VeritySEM II 200mm/300mm.

Information

Course Benefits

Increase functional knowledge of CD-SEM tools 150mm/ 200/300mm system components and subcomponents * Standardize maintenance practices according to Applied Materials procedures to reduce system

downtime and increase repeatable results.

* Reduce system faults by increasing adherence to the routine maintenance schedule

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom on customer site or GTI Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4