Critical Dimension

Basic Applications


Who should attend?

This course is required for anyone who will be working with VeritySem II 200mm/300mm Tool family CD-SEM system including hardware engineers, and application engineers.

Course Information

Prerequisites: None

Course location: Classroom and Cleanroom on customer site or GTI Application Lab
Course Length: 5 working days

Maximum Number of attendees: 4


Course Benefits

Increase knowledge of system components and their interrelationships – Improve Automatic CD Recipes

Course Objective and Summary

Course Objective and Summery

* Locate and describe all safety hazards associated with the basic operations of theCD-SEM tools
* Locate and describe the main components and Capabilities of the CD-SEM tools 150mm/200mm/300 * Perform a CD Measurement Job
* Program a recipe for 5 site automatic CD
* Optimize a recipe
* Apply Best Known Methods (BKM’s)
* Review the Results