[We ]

what we do

State-of-the-Art Metrology Tool Experts

Complete System Sales, Turn-key Solutions

We specialize in the refurbishment and renew of equipment made by the following OEM's AMAT, KLA-Tencor, and August Technologies (ONTO)

Expert Service, Support, Hardware, and Application

Expert FSE's available in North America, Europe, Asia. Programs include on-call and on-site solutions.

Training Packages and Callibration Tools

Hardware and application training as well as custom calibration wafers and targets

Demo Lab Cabability and Foundry Service

State-of-the-art metrology equipment running customer product for evaluation or development

Obselence and Upgrades

Broad-spectrum exchanges and coverage

Spare Parts and Support Equipment

Comprehensive inventory of over 60,000 spares

System Sales | Support | Calibration | Demo Lab | Upgrades | Spares

Defect Review SEM

Applied Materials, Inc. has introduced the SEMVision DR-SEM system, a fully-automated defect review and classification scanning electron microscope specifically designed for in-line operation on advanced semiconductor production lines. The system uses several SEM imaging and material analysis techniques to improve chipmakers’ yield earning cycles during fab ramp-up and enable tighter yield control in volume production.

The system features Multiple-Perspective SEM Imaging (MPSI) technology that provides chipmakers with more information for accurately classifying and analyzing defect types than current SEM or optical imaging techniques. By enhancing both the topographic and material characteristics of defects, MPSI technology has enabled the development of an automatic defect classification (ADC) concept that classifies defects into types that are closely linked to the defects' source.

 

Patterned and Bare Wafer Inspection Systems​

Our metrology solutions can quickly measure imaging performance on silicon wafers and feeds that data back into the lithography system in real-time, helping to keep lithography performance stable in high-volume chip manufacturing. 

     Our inspection solutions help to locate and analyze individual chip defects amid billions of printed patterns. Various new materials and new processes are being examined, with a view of adopting EUV lithography for volume production. Hitachi has now developed the LS9300A wafer surface inspection system, which is capable of detecting defects specific to the EUV process at high speed and with high sensitivity.

System Sales | Support | Calibration | Demo Lab | Upgrades | Spares

Critical Dimension Metrology Systems

Critical dimension (CD) metrology is one of the most critical enabling technologies in semiconductor manufacturing. Much media attention is devoted to the ever shrinking feature sizes of microelectronic devices, as this parameter heavily influences speed of operation and power demands. Less appreciated is the fact that while the dimensions are on the nanometer scale, the manufacturing tolerances must be far smaller. This places great demands on the quality assurance assessment techniques.

The system features Multiple-Perspective SEM Imaging (MPSI) technology that provides chipmakers with more information for accurately classifying and analyzing defect types than current SEM or optical imaging techniques. By enhancing both the topographic and material characteristics of defects, MPSI technology has enabled the development of an automatic defect classification (ADC) concept that classifies defects into types that are closely linked to the defects' source.

 

GTI Technology Limited

Unit E. 11/F Tower B
Billion Center No. 1 Wang Kwong Road Kowloon Bay
Hong Kong
+86-13817852188
+14802955535
jason.lu@gt3i.com

Global Headquarters

15936 N 78th St
Scottsdale, AZ 85260
Toll Free: (800) 608-4834 Local: (480) 400-6910
sales@gt3i.com

Europe

Teltec North
Am Moosbach 6 74535 Mainhardt
Phone: +49 790 391 4412
Mobile: +49 173 279 1153
Fax: +49 790 391 4411
martin.lentmaier@teltec.com

Teltec South
| Spain | France | Italy | Belgium |
| Switzerland |
939, rue de la croix verte 34090 Montpellier
Phone: +33 467 22 40 00
Fax: +33 467 22 26 37
info-fr@teltec.com
teltec.com