Metrology Experts • GTI

VeraSem 3D

NANOSem 3D

Verity I

Verity II

Verity III

Verity IV I +

DR-SEM

SEMVision DR-300

SEMVision G2

SEMVision G2+

SEMVision G3

SEMVision G4

SEMVision G5

Inspection

WF-736DUO

Compass 200

Compuls 2T

Compuls 3T

Complus 4T

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Check out our updated System Sales page

Watch: One of our tools running Final ADC test at GTI’s lab

State-of-the-Art Metrology Tool Experts

what we do

Spare Parts and Support Equipment

Comprehensive inventory of over 60,000 spare parts in stock.
- End of life issues resolution
- Upgrades
- Optimization

Complete System Sales, Turn-key Solutions

We specialize in the refurbishment and renewal of equipment manufactured by Applied Materials®, KLA-Tencor, and August Technologies (ONTO™).

Training Packages

Hardware and Application training courses on-site or at GTI's applications lab.

Expert Service, Support, Hardware, and Application

Elite Field Service Experts stationed in North America, Europe, and Asia. Programs include on-call and on-site solutions, tool installation, and tool relocation services.

Demo Lab and Foundry Service

State-of-the-art, fully calibrated metrology equipment currently running customer products for evaluation or development.
- Special wafer thicknesses
- Exotic materials
- 150mm, 200mm, 300mm wafers

System Sales | Service Support | Calibration | Demo Lab | Upgrades | Spares

Defect Review SEM

Applied Materials®, Inc. has introduced the SEMVision DR-SEM system, a fully-automated defect review and classification scanning electron microscope specifically designed for in-line operation on advanced semiconductor production lines. The system uses several SEM imaging and material analysis techniques to improve chipmakers’ yield earning cycles during fab ramp-up and enable tighter yield control in volume production.

Learn More

The system features Multiple-Perspective SEM Imaging (MPSI) technology that provides chipmakers with more information for accurately classifying and analyzing defect types than current SEM or optical imaging techniques. By enhancing both the topographic and material characteristics of defects, MPSI technology has enabled the development of an automatic defect classification (ADC) concept that classifies defects into types that are closely linked to the defects' source.

GTI Has in stock the following tools in stock: AMAT applied materials PDC SEMvision Semvision VeritySEM Verity sem ComPASS Compass ComPLUS Complus WF-736 Semvision G2 G2+ G3 G4 G5 SEMvision G2 G2+ G3 G4 G5 VeritySEM VeraSEM NanoSEM AMAT Verity I II III AMAT Verity 2 Verity2 verity2 verity 2 amat verity 2 AMAT Verity 3 AMAT Verity 1 AMAT Complus MP 2/2T 3/3T 4/4T AMAT Compass 200 AMAT Compass 300 AMAT Semvision G2 AMAT Semvision G2+ AMAT Semvision G3 SemvisionG3 AMAT Semvision G4 SemvisionG4 AMAT Semvision G5 SemvisionG5 AMAT SemVision G2 AMAT SemVision G2+ AMAT SemVision G3 SemvisionG3 AMAT SemVision G4 SemvisionG4 AMAT SemVision G5 SemvisionG5

News

Beginning first half of 2020, GTI developed the capability of processing transparent wafers on DR-SEM and CD-SEM tools.

Silicon Carbide H4 and H6, GaAs, Sapphire wafers, ZnO, Gallium Nitride wafers, Lithium Niobate wafers, SOI, and Quartz.

System Sales | Service Support | Calibration | Demo Lab | Upgrades | Spares

Critical Dimension Metrology Systems

Critical dimension (CD) metrology is one of the most essential technologies in semiconductor manufacturing. Much media attention is devoted to the ever shrinking feature sizes of microelectronic devices, as this parameter heavily influences speed of operation and power demands. Less appreciated is the fact that while the dimensions are on the nanometer scale, the manufacturing tolerances must be far smaller. This places great demands on the quality assurance assessment techniques.

Contact Directly

Headquarters

15936 N 78th St
Scottsdale, AZ 85260

Toll Free: (800) 608-4834
Local: (480) 400-6910

Sales

sales@gt3i.com

Asia

GTI Technology Limited

Unit E. 11/F Tower B Billion Center No. 1 Wang Kwong Road Kowloon Bay

Hong Kong

+86-13817852188

+14802955535

Europe North

TELTEC
www.teltec.com
Am Moosbach 6
74535 Mainhardt

Phone: +49 790 391 4412

Mobile: +49 173 279 1153

Fax: +49 790 391 4411

Europe South

Teltec SAS
939, rue de la croix verte
34090 Montpellier

Phone: +33 467 22 40 00

Fax: +33 467 22 26 37