DR-SEM | DEFECT REVIEW

DR SEM (with or without FIB)
With our Z-stage, you have the ability to process wafers of varying thicknesses, up to 2mm.
Compound Semi Conductor | Advanced Packaging | HVM-High Volume Measurement
KEY FEATURES:
- Optimized for Compound Semiconductor Applications
- Advanced Packaging Compatibility
- Flexible Wafer Handling
- Supported wafer sizes: (150/200/300 mm)
PRODUCT LINEUP
DR-SEM | Defect Review
SEMVision®DR-300CX

*Multiple Systems Available
SEMVision®NextGEN

*Defect Analysis System
SEMVision®G2

*Defect Analysis System
SEMVision®G3

*Multiple Systems Available
SEMVision®G4

*Multiple Systems Available
SEMVision®G5

*Defect Analysis System
SEMVision®G6

*Defect Analysis System

