DARKFIELD OPTICAL INSPECTION
DARKFIELD INSPECTION (Patterned & Bare Wafers)
Delivers advanced defect detection and patterned wafer review with high sensitivity and repeatability.
KEY FEATURES:
- High-Sensitivity Detection
- Patterned Wafer Review
- Flexible Operation
- Intergrated Performance
PRODUCT LINEUP
DARKFIELD | Optical Inspection
DARKFIELD | Optical Inspection
COMPASS 200
Wafer Sizes Supported
150mm, 200mm, 300mm
COMPASS 300
Wafer Sizes Supported
150mm, 200mm, 300mm
ComPLUS MP
Wafer Sizes Supported
150mm, 200mm, 300mm
ComPLUS 2T
Wafer Sizes Supported
150mm, 200mm, 300mm
ComPLUS 3/3T
Wafer Sizes Supported
150mm, 200mm, 300mm
ComPLUS 4/4T
Wafer Sizes Supported
150mm, 200mm, 300mm
SUBMIT REQUEST FOR A QUOTE or INFO
QUICK LINKS
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CONTACT
EMAIL: sales@gt3i.com
PHONE: 480-400-6910
PHONE: 800-608-4834
LOCATION: 15936 N 78th St
Scottsdale, AZ 85260
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